Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176185 | Apparatus and method for processing substrate using plasma | Min Sung Han, Jae Hoo Lee, Yoon Jong Ju | 2024-12-24 |
| 12146710 | Substrate treating apparatus and substrate treating system comprising the same | Young Je UM, Joun Taek Koo, Dong-Hun Kim, Seong Gil LEE, Ji Hwan Lee +3 more | 2024-11-19 |
| 12142492 | Method for treating substrate and apparatus for treating substrate | Ji Hwan Lee, Seong Gil LEE, Dong Sub Oh, MYOUNGSUB NOH, Dong-Hun Kim | 2024-11-12 |
| 11978654 | Substrate processing apparatus | Min Sung Han, Yoon Jong Ju, Jaehoo Lee | 2024-05-07 |