Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Seung Min Shin, Sang Jin Park, Hae-Won Choi, Jang Jin LEE, Ji Hwan Park +4 more | 2024-03-05 |