Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12138666 | Substrate processing method and substrate processing apparatus | Toru Endo, Yuta YAMANOUCHI, Rikuta AOKI, Tsung Ju LIN, Jun SAWASHIMA | 2024-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12138666 | Substrate processing method and substrate processing apparatus | Toru Endo, Yuta YAMANOUCHI, Rikuta AOKI, Tsung Ju LIN, Jun SAWASHIMA | 2024-11-12 |