Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12145171 | Substrate treating apparatus | Takahiro Yamaguchi | 2024-11-19 |
| 12145179 | Substrate treating apparatus | Takahiro Yamaguchi | 2024-11-19 |
| 12138666 | Substrate processing method and substrate processing apparatus | Toru Endo, Yuta YAMANOUCHI, Yuta SEGAWA, Rikuta AOKI, Tsung Ju LIN | 2024-11-12 |
| 11996302 | Substrate processing apparatus and substrate processing method | Tomoaki Aihara, Takahiro Yamaguchi | 2024-05-28 |