Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12138666 | Substrate processing method and substrate processing apparatus | Yuta YAMANOUCHI, Yuta SEGAWA, Rikuta AOKI, Tsung Ju LIN, Jun SAWASHIMA | 2024-11-12 |
| 11883858 | Substrate processing device and substrate processing method | Kenji Kawaguchi, Kota Tanikawa | 2024-01-30 |
| 11881419 | Substrate processing apparatus | Masayuki Hayashi, Nobuyuki Shibayama | 2024-01-23 |