Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940734 | Apparatus and method for treating substrate | Ki Hoon CHOI, Eung Su Kim, Pil Kyun HEO, Jin Yeong SUNG, Hae-Won Choi +1 more | 2024-03-26 |
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Seung Min Shin, Sang Jin Park, Hae-Won Choi, Jang Jin LEE, Ji Hwan Park +4 more | 2024-03-05 |