Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11959170 | Precursor supply unit, substrate processing system, and method of fabricating semiconductor device using the same | Soyoung Lee, Hyunjae Lee, Ik Soo Kim | 2024-04-16 |
| 11887892 | Method for forming semiconductor die with die region and seal-ring region | Jin Won Jeong, Young Hun JUN, Jong-woon LEE, Jae Sik Choi | 2024-01-30 |