Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027351 | Plasma non-uniformity detection | Alexandre De Chambrier | 2024-07-02 |
| 12002652 | Variable mode plasma chamber utilizing tunable plasma potential | Shawming Ma | 2024-06-04 |
| 11887820 | Sector shunts for plasma-based wafer processing systems | Alexandre De Chambrier | 2024-01-30 |