Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027351 | Plasma non-uniformity detection | Stephen E. Savas | 2024-07-02 |
| 11961711 | Radio frequency match network and generator | — | 2024-04-16 |
| 11887820 | Sector shunts for plasma-based wafer processing systems | Stephen E. Savas | 2024-01-30 |