Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159789 | Atomic layer etch process using plasma in conjunction with a rapid thermal activation process | — | 2024-12-03 |
| 12119216 | Arc lamp with forming gas for thermal processing systems | Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler +1 more | 2024-10-15 |
| 12002652 | Variable mode plasma chamber utilizing tunable plasma potential | Stephen E. Savas | 2024-06-04 |