Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094695 | Multi-zone temperature control plasma reactor | Steven Lee, Sha Rin, Zhou Xiaofeng, Mei Rui | 2024-09-17 |
| 12062524 | Plasma reactor having a variable coupling of low frequency RF power to an annular electrode | Kui Zhao, Shenjian Liu | 2024-08-13 |