Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094695 | Multi-zone temperature control plasma reactor | Tuqiang Ni, Steven Lee, Zhou Xiaofeng, Mei Rui | 2024-09-17 |
| 12046458 | Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting method | Jie Du | 2024-07-23 |