Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062524 | Plasma reactor having a variable coupling of low frequency RF power to an annular electrode | Kui Zhao, Tuqiang Ni | 2024-08-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062524 | Plasma reactor having a variable coupling of low frequency RF power to an annular electrode | Kui Zhao, Tuqiang Ni | 2024-08-13 |