Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077858 | Tungsten deposition | Pragna Nannapaneni, Novy Tjokro, Sema Ermez, Ruopeng Deng, Tianhua Yu +1 more | 2024-09-03 |
| 12060639 | Rapid flush purging during atomic layer deposition | Pragna Nannapaneni, Sema Ermez, Novy Tjokro, Ruopeng Deng, Tianhua Yu +2 more | 2024-08-13 |
| 12014928 | Multi-layer feature fill | Xiaolan Ba, Ruopeng Deng, Juwen Gao, Lawrence Schloss | 2024-06-18 |