Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077858 | Tungsten deposition | Novy Tjokro, Sema Ermez, Ruopeng Deng, Tianhua Yu, Xiaolan Ba +1 more | 2024-09-03 |
| 12060639 | Rapid flush purging during atomic layer deposition | Sema Ermez, Novy Tjokro, Ruopeng Deng, Tianhua Yu, Xiaolan Ba +2 more | 2024-08-13 |