Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077858 | Tungsten deposition | Pragna Nannapaneni, Novy Tjokro, Sema Ermez, Tianhua Yu, Xiaolan Ba +1 more | 2024-09-03 |
| 12060639 | Rapid flush purging during atomic layer deposition | Pragna Nannapaneni, Sema Ermez, Novy Tjokro, Tianhua Yu, Xiaolan Ba +2 more | 2024-08-13 |
| 12014928 | Multi-layer feature fill | Xiaolan Ba, Juwen Gao, Sanjay Gopinath, Lawrence Schloss | 2024-06-18 |
| 11972952 | Atomic layer deposition on 3D NAND structures | Xiaolan Ba, Tianhua Yu, Yu-Hao Pan, Juwen Gao | 2024-04-30 |