Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131886 | Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system | Alexei Marakhtanov, Felix Kozakevich, John Holland | 2024-10-29 |
| 12080518 | Impedance match with an elongated RF strap | Felix Kozakevich, Alexei Marakhtanov, Bing Ji, John Holland | 2024-09-03 |
| 11935726 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2024-03-19 |
| 11908660 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2024-02-20 |