Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165844 | Uniformity control circuit for impedance match | Alexei Marakhtanov, Felix Kozakevich, John Holland | 2024-12-10 |
| 12080518 | Impedance match with an elongated RF strap | Felix Kozakevich, Alexei Marakhtanov, Ranadeep Bhowmick, John Holland | 2024-09-03 |
| 11935726 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2024-03-19 |
| 11908660 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, John Holland, Felix Kozakevich, Alexei Marakhtanov | 2024-02-20 |