Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183544 | Tuning voltage setpoint in a pulsed RF signal for a tunable edge sheath system | David Hopkins, Bradford J. Lyndaker, Felix Kozakevich | 2024-12-31 |
| 12165844 | Uniformity control circuit for impedance match | Felix Kozakevich, Bing Ji, John Holland | 2024-12-10 |
| 12131886 | Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system | Ranadeep Bhowmick, Felix Kozakevich, John Holland | 2024-10-29 |
| 12080518 | Impedance match with an elongated RF strap | Felix Kozakevich, Bing Ji, Ranadeep Bhowmick, John Holland | 2024-09-03 |
| 11935730 | Systems and methods for cleaning an edge ring pocket | Eric A. Hudson, Scott Briggs, John Holland, Felix Kozakevich, Kenneth Lucchesi | 2024-03-19 |
| 11935726 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2024-03-19 |
| 11908660 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, John Holland, Felix Kozakevich, Bing Ji | 2024-02-20 |