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Oleksandr MIKHNENKO

Lam Research: 1 patents #135 of 408Top 35%
📍 San Diego, CA: #1,868 of 4,598 inventorsTop 45%
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1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12142464 In situ real-time sensing and compensation of non-uniformities in substrate processing systems Changyou Jing, Benny Wu, Slobodan Mitrovic 2024-11-12