SM

Slobodan Mitrovic

Lam Research: 1 patents #135 of 408Top 35%
🗺 California: #26,178 of 67,048 inventorsTop 40%
Overall (2024): #264,602 of 561,600Top 50%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12142464 In situ real-time sensing and compensation of non-uniformities in substrate processing systems Changyou Jing, Benny Wu, Oleksandr MIKHNENKO 2024-11-12