Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165891 | Identification of and compensation for a failure in a heater array | — | 2024-12-10 |
| 12142464 | In situ real-time sensing and compensation of non-uniformities in substrate processing systems | Benny Wu, Oleksandr MIKHNENKO, Slobodan Mitrovic | 2024-11-12 |
| 11901944 | Power and data transmission to substrate support in plasma chambers via optical fiber | Fred Dennis Egley | 2024-02-13 |