Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062538 | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement | Jengyi Yu, Samantha Tan, Liu-Yang Yang, Chen-Wei Liang, Boris Volosskiy +4 more | 2024-08-13 |