Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112923 | Reaction chamber lining | Na Li, Haiyang Liu, Zhaochao Chen, Yonggang Hou, Chengyi Wang +2 more | 2024-10-08 |
| 12009188 | Rotatable faraday cleaning apparatus and plasma processing system | Haiyang Liu, Dongdong HU, Xiaobo Liu, Na Li, Song GUO +2 more | 2024-06-11 |
| 11955323 | Device for blocking plasma backflow in process chamber to protect air inlet structure | Na Li, Dongdong HU, Xiaobo Liu, Haiyang Liu, Song GUO +2 more | 2024-04-09 |