Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112923 | Reaction chamber lining | Na Li, Shiran CHENG, Haiyang Liu, Zhaochao Chen, Chengyi Wang +2 more | 2024-10-08 |
| 12027345 | Etching uniformity regulating device and method | Xiaobo Liu, Xuedong Li, Yong Qiu, Na Li, Dongdong HU +2 more | 2024-07-02 |