Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009188 | Rotatable faraday cleaning apparatus and plasma processing system | Haiyang Liu, Dongdong HU, Xiaobo Liu, Na Li, Shiran CHENG +2 more | 2024-06-11 |
| 11955323 | Device for blocking plasma backflow in process chamber to protect air inlet structure | Na Li, Dongdong HU, Xiaobo Liu, Haiyang Liu, Shiran CHENG +2 more | 2024-04-09 |