Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112923 | Reaction chamber lining | Na Li, Shiran CHENG, Haiyang Liu, Zhaochao Chen, Yonggang Hou +2 more | 2024-10-08 |
| 12063866 | Multilayer magnetic tunnel junction etching method and MRAM device | Juebin Wang, Zhongyuan Jiang, Ziming Liu, Dongchen CHE, Hushan Cui +4 more | 2024-08-13 |
| 12035633 | Method for etching magnetic tunnel junction | Ziming Liu, Juebin Wang, Zhongyuan Jiang, Dongchen CHE, Hushan Cui +4 more | 2024-07-09 |
| 12027345 | Etching uniformity regulating device and method | Xiaobo Liu, Xuedong Li, Yong Qiu, Na Li, Yonggang Hou +2 more | 2024-07-02 |
| 12009188 | Rotatable faraday cleaning apparatus and plasma processing system | Haiyang Liu, Dongdong HU, Xiaobo Liu, Na Li, Shiran CHENG +2 more | 2024-06-11 |
| 11963455 | Etching method for magnetic tunnel junction | Dongchen CHE, Dongdong HU, Lu-Zhuo Chen | 2024-04-16 |
| 11955323 | Device for blocking plasma backflow in process chamber to protect air inlet structure | Na Li, Dongdong HU, Xiaobo Liu, Haiyang Liu, Shiran CHENG +2 more | 2024-04-09 |
| 11877519 | Semiconductor device manufacturing method | Zhongyuan Jiang, Ziming Liu, Juebin Wang, Dongchen CHE, Hushan Cui +4 more | 2024-01-16 |