Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12162698 | Substrate transport apparatus | Daniel Babbs, Robert C. May | 2024-12-10 |
| 11972965 | Method and apparatus for substrate transport apparatus position compensation | Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker | 2024-04-30 |