Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978649 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew | 2024-05-07 |
| 11972965 | Method and apparatus for substrate transport apparatus position compensation | Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2024-04-30 |
| 11923729 | Position feedback for sealed environments | Reza Saeidpourazar, Branden Gunn, Matthew W. Coady, Ulysses Gilchrist | 2024-03-05 |
| 11908721 | Tool auto-teach method and apparatus | Aaron Gawlik, Reza Saeidpourazar | 2024-02-20 |
| 11862498 | Substrate processing apparatus | Roumen Botev | 2024-01-02 |