Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12162698 | Substrate transport apparatus | Vincent W. Tsang, Robert C. May | 2024-12-10 |
| 12142505 | Transport apparatus with linear bearing | Robert C. May, Robert T. Caveney | 2024-11-12 |
| 12142511 | Substrate processing apparatus | Alexander Krupyshev, Ulysses Gilchrist, Robert T. Caveney | 2024-11-12 |
| 11978648 | Substrate transport | Robert T. Caveney, Robert C. May, Krzysztof A Majczak | 2024-05-07 |