Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009228 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2024-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009228 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2024-06-11 |