Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146218 | Precursor container | — | 2024-11-19 |
| 12148609 | Silicon oxide deposition method | Varun Sharma, Daniele Chiappe, Eva Tois, Viraj Madhiwala, Marko Tuominen +2 more | 2024-11-19 |
| 12094686 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2024-09-17 |
| 11956977 | Atomic layer deposition of III-V compounds to form V-NAND devices | Varun Sharma, Jan Willem Maes | 2024-04-09 |
| 11948813 | Showerhead device for semiconductor processing system | Varun Sharma | 2024-04-02 |
| 11873558 | Precursor container | — | 2024-01-16 |