Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948828 | Pin-less substrate transfer apparatus and method for a processing chamber | Srinivas D. Nemani, Adib Khan, Qiwei Liang | 2024-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948828 | Pin-less substrate transfer apparatus and method for a processing chamber | Srinivas D. Nemani, Adib Khan, Qiwei Liang | 2024-04-02 |