Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11868147 | Optical emission spectroscopy control of gas flow in processing chambers | Sunil Kumar Garg, Paul Kiely, Keith A. Miller, Rajat Agrawal | 2024-01-09 |
PD
Philip DiGiacomo
Overall (2024): #311,517 of 561,600Top 60%
1
Patents 2024