Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11868147 | Optical emission spectroscopy control of gas flow in processing chambers | Philip DiGiacomo, Sunil Kumar Garg, Keith A. Miller, Rajat Agrawal | 2024-01-09 |
PK
Paul Kiely
Overall (2024): #317,694 of 561,600Top 60%
1
Patents 2024