Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169361 | Substrate processing apparatus and method | Ivo Raaijmakers, Daniele Piumi, Ivan Zyulkov, David Kurt de Roest | 2024-12-17 |
| 12166099 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Kiran Shrestha, Petri Raisanen | 2024-12-10 |
| 12148609 | Silicon oxide deposition method | Varun Sharma, Daniele Chiappe, Eva Tois, Viraj Madhiwala, Marko Tuominen +2 more | 2024-11-19 |
| 12136552 | Toposelective vapor deposition using an inhibitor | Andrea Illiberi, Varun Sharma, Marko Tuominen, Shaoren Deng | 2024-11-05 |
| 12094936 | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures | Fu Tang, Peng-Fu Hsu, Qi Xie | 2024-09-17 |
| 11965238 | Selective deposition of metal oxides on metal surfaces | Andrea Illiberi, Shaoren Deng, Giuseppe Alessio Verni | 2024-04-23 |
| 11926895 | Structures including metal carbide material, devices including the structures, and methods of forming same | Petri Raisanen, Eric James Shero | 2024-03-12 |
| 11898240 | Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces | Andrea Illiberi, Giuseppe Alessio Verni, Shaoren Deng, Daniele Chiappe, Eva Tois +1 more | 2024-02-13 |