MS

Mark D. Smith

KL Kla: 2 patents #23 of 230Top 10%
Overall (2024): #137,447 of 561,600Top 25%
2
Patents 2024

Issued Patents 2024

Patent #TitleCo-InventorsDate
12164277 System and method for mitigating overlay distortion patterns caused by a wafer bonding tool Franz Zach, Roel Gronheid 2024-12-10
12117347 Metrology target design for tilted device designs Myungjun Lee, Michael Adel, Eran Amit, Daniel Kandel 2024-10-15