Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165841 | Dual-frequency, direct-drive inductively coupled plasma source | Yuhou Wang, Alexander Paterson | 2024-12-10 |
| 12159770 | Cooled shield for ICP source | — | 2024-12-03 |
| 12119254 | Electrostatic chuck assembly for plasma processing apparatus | Weimin Zeng | 2024-10-15 |
| 12106947 | RF reference measuring circuit for a direct drive system supplying power to generate plasma in a substrate processing system | — | 2024-10-01 |
| 12040159 | Dual frequency matching circuit for inductively coupled plasma (ICP) loads | — | 2024-07-16 |
| 12009184 | Lift pin assembly for a plasma processing apparatus | Changle Guan | 2024-06-11 |
| 12002701 | Electrostatic chuck assembly for plasma processing apparatus | — | 2024-06-04 |