Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119254 | Electrostatic chuck assembly for plasma processing apparatus | Maolin Long | 2024-10-15 |
| 12120311 | Encoder and associated signal processing method | Chi-Wang Chai, Wei Li, Wujun Chen, Wei Pu | 2024-10-15 |