Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146219 | Flow control features of CVD chambers | Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2024-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146219 | Flow control features of CVD chambers | Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2024-11-19 |