Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11934103 | Apparatus for post exposure bake of photoresist | Douglas A. Buchberger, Jr., Dmitry Lubomirsky, Srinivas D. Nemani | 2024-03-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11934103 | Apparatus for post exposure bake of photoresist | Douglas A. Buchberger, Jr., Dmitry Lubomirsky, Srinivas D. Nemani | 2024-03-19 |