Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158705 | End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses | Joseph H. Lyons, Ping Zhou, Zhuangxiong HUANG, Reinier Theodorus Martinus Jilisen | 2024-12-03 |