Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158705 | End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses | Joseph H. Lyons, Jimi Hendriks, Ping Zhou, Zhuangxiong HUANG | 2024-12-03 |