Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158705 | End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses | Jimi Hendriks, Ping Zhou, Zhuangxiong HUANG, Reinier Theodorus Martinus Jilisen | 2024-12-03 |
| 11906907 | Apparatus and method for determining a condition associated with a pellicle | Derk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Richard David Jacobs, Andrew Judge +5 more | 2024-02-20 |