Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106943 | Substrate halo arrangement for improved process uniformity | Simon Ruffell, Kevin Anglin, Tyler Rockwell, Christopher Campbell, Kevin M. Daniels +2 more | 2024-10-01 |
| 11948781 | Apparatus and system including high angle extraction optics | Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Kevin M. Daniels, Kevin T. Ryan +3 more | 2024-04-02 |