Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106943 | Substrate halo arrangement for improved process uniformity | Jay Wallace, Kevin Anglin, Tyler Rockwell, Christopher Campbell, Kevin M. Daniels +2 more | 2024-10-01 |
| 11908691 | Techniques to engineer nanoscale patterned features using ions | John Hautala, Adam Brand, Huixiong Dai | 2024-02-20 |