Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12143087 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Yaswanth Rangineni | 2024-11-12 |
| 11862435 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Karl Leeser, Mohamed Sabri | 2024-01-02 |