Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948846 | Analyzing in-plane distortion | Wenjiao Wang, Joshua Maher, Xinhai Han, Tza-Jing Gung | 2024-04-02 |
| 11935751 | Boron nitride for mask patterning | Siyu Zhu, Chuanxi Yang, Hang Yu, Yeonju Kwak, Jeong Hwan Kim +2 more | 2024-03-19 |
| 11929278 | Low impedance current path for edge non-uniformity tuning | Madhu Santosh Kumar Mutyala, Saketh Pemmasani, Akshay Dhanakshirur, Mayur Govind Kulkarni, Hang Yu | 2024-03-12 |
| 11869795 | Mesa height modulation for thickness correction | Saketh Pemmasani, Akshay Dhanakshirur, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala, Hang Yu | 2024-01-09 |