Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164093 | Reflective compact lens for magneto-optic Kerr effect metrology system | Alex Zheng, Jun Wang, Chunxia Li, Changfei Yan, Rui Ni +7 more | 2024-12-10 |
| 12013355 | Methods and systems for compact, small spot size soft x-ray scatterometry | Kerstin Purrucker, Michael Friedmann | 2024-06-18 |
| 11913874 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2024-02-27 |
| 11906770 | Monolithic optical retarder | Shankar Krishnan | 2024-02-20 |