Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013355 | Methods and systems for compact, small spot size soft x-ray scatterometry | David Y. Wang, Michael Friedmann | 2024-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013355 | Methods and systems for compact, small spot size soft x-ray scatterometry | David Y. Wang, Michael Friedmann | 2024-06-18 |